---

---

Scanning Electron Microscope Laboratory

Northern Arizona University, Flagstaff AZ 86011-4099

 

---

The laboratory houses a JSM-6480LV scanning electron microscope. It is permits imaging of specimens which cannot be viewed at high vacuum due to high water content or due to a non-conductive surface. Its asynchronous five-axis mechanically eucentric stage with compeucentric rotation and tilt can accommodate a specimen of up to 8 inches in diameter. Imaging can be undertaken using secondary electrons, backscattered electrons and cathodoluminescence. Oxford energy-dispersive spectrometer (EDS) and wave-length dispersive spectrometer (WDS) provide extensive semi-quantitative and quantitative analytical capabilities including X-ray mapping.

 

Specifications

Resolution	High Vacuum mode: 3.0 nm (30kV) Low Vacuum mode: 4.0 nm (30kV)
Accelerating Voltage	0.3 to 30 kV
Magnification	x5 to 300,000
Filament	Pre-centered W hairpin filament (with continuous auto bias)
Objective Lens	Super Conical lens
Objective Lens Apertures	Click-stop type (3-step variable) Fine position controllable in X/Y directions
Maximum Specimen Size	300 mm x 80 mm tall
Specimen Stage	5 axis computer controlled eucentric goniometer X = 125 mm, Y = 100 mm, Z = 5-80 mm Tilt = -10 to 90°, Rotation = 360° (endless)
Display LCD	20 inch, high resolution FPD
Vacuum mode changeover	Automatic (PC interface controlled)

Example Images

 

Back-scattered electron image of a chondrule from an ordinary chondrite meteorite.